|
|
|
|
|
||||||
|
|
|
|
|
|||
|
|
|
|
|
|
|
|
 |
 |
|
 |
|
 |
|
 |
|
 |
|
|
|
|
|
|
|
|
|
|
Tokyo Electron Limited Hermes-Epitek Corp. Hermes Systems |
|
|
|
iStar was built based on numerous innovations in Ion Implantation technology. The end result is a new generation High Current Ion Implanter that delivers high productivity at low energy, zero energy contamination down to 2 keV beam, and the capability of large implant angle control. |
|
|
|
|
|
|
|
|
|
Home | About Us | Product | Support | Press | Career Contact Us | Site Map |
