AIBT - Advanced Ion Beam Technology

	Applications Technical Publications				AIBT is developing a series of Semiconductor Processing Equipment in Ion Implant and related fields. The first product is a low energy and high current Ion Implanter: iStar. iStar: A world class low energy and high current implanter, iStar was built upon numerous innovative designs that surpass all its competitions in delivering the highest productivity and energy pure (zero energy contamination) beam down to 2 keV for mass-production. iStar also sets a new standard in the implanter industry with its high beam current at extremely low energy (~200 eV) with low energy contamination and precise control.

					With unique reversed spin and slow disk rotation speed capability, iStar eliminates the risk of particle induced pattern collapse damage and maintains high productivity at advanced technology nodes. iStar's compact and modular design provides system maintainability and serviceability advantages, together with high productivity, the cost of ownership benefit becomes the new benchmark for the high current implanter.