IIT Conference, Oct. 2004 -
The Effects of Energy Non-Monochromaticity of B11 Ion Beams on B11 Diffusion

IIT Conference, Oct. 2004 -
Pad Angle Verification and Cone Angle Correction Method for
Individual Rotatable Pads of a Batch Disk

Semicon Taiwan Seminar 2003 -
Ultra-Shallow Junction Formation
by Point Defect Engineering and Ultra Low Energy Boron Implants
IIT Conference, Sep. 2002 -
Energy Contamination Control
During Ion Beam Decelartion For Low Energy Ion Implantation

IIT Conference, Sep. 2002 -
High Efficiency and Low Cost LINAC System Design
Suitable for High Energy Ion Implanters

IIT Conference, Sep. 2002 -
Water Cooled Plasma Flood Source for Intense Ion Beam Implantation

Applied Physics Letter, Dec. 2000 -
Response function during oxygen sputter profiling and
its application to deconvolution of ultrashallow B depth profiles in Si