Dual BeamTall Beam and Spot Beam

Beam optics enables tunable beam shape based on process and productivity requirements.

Spot beam with 2D scan delivers superior process performance for ultra low energy (ULE) applications.

Tall beam with 1D scan delivers high productivity for typical high current implantation applications.

Patented multipole design enables spot or tall beam formation without hardware change.

Tall Beam 1D Scan

Spot Beam 2D Scan